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IM-80 WAFER AUTOLOADER


IM-80

Easy to operate, has fast, safety transfer system, and fast wafer exchange rates.

Nidek model IM-80 is the newest Wafer Autoloader system for patterned wafers used in the microchip fabrication. Nidek has utilized its year of experience in designing and manufacturing Autoloader system to devote to the most outstanding microchip fabrication on the market. The IM-80 adopts a simplized robotics mechanism for stable wafer transferring.

FEATURES

  • Micro inspection and Macro inspection allow versatile visual surface inspection.
  • Contamination was carefully considered in designing, resulting in a system that is virtually contamination free.
  • The quick, highly established wafer transfer mechanism allows high through-put.
  • Accurate flat finder and centering enable easy operation.
  • The stage of sampling step is five channel.
  • Wafer size-- (5 inches, 6 inches, and 8 inches) or (4 inches, 5 inches, and 6 inches)



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