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Product Showroom

Y2K Compliance Info



SEMICONDUCTOR INDUSTRY EQUIPMENT

Inspection Microscope

Autoloader

Flatness Tester



OPHTHALMIC EQUIPMENT



DIAGNOSTIC EQUIPMENT



LENS EDGERS



SURGICAL LASER EQUIPMENT


 

IM-800 & IM-8000 WAFER INSPECTION MICROSCOPE SYSTEMS


IM-8000

It's new! It's fast! It's reliable!

  • Highest throughput is realized!
    Approx. 1.2x of Nidek existing models.
    Approx. 2x (maximum) of similar systems from other manufacturers.
  • Real-time tracking autofocus
    Review station feasibility (review software, high accuracy microscope stage and defect classification)
  • Macro trace function is newly provided!
  • Bottom surface macro inspection
  • SMIF compliant
  • AGV compliant
  • Non-contact wafer centering
    Wafers are transferred to the microscope stage without mechanical centering.
  • Turret positioning correction
    Highest turret positioning accuracy (parcentricity) at changing magnification is enabled by the positional correction of each objective lens.


Advantages of the Nidek confocal system

  1. The brightness is substantially increased without losing the existing resolving power. A mercury or xenon lamp, which has been separately required for the confocal system, is no longer necessary. In the Nidek system both confocal and bright/dark inspections are performed with halogen lamp only.
  2. Use of halogen lamps reduces the running cost to one hundredth of existing systems.
  3. The light of halogen lamp, which is close to natural light, provides more accurate color information and also minimizes eye fatigue of the operator.
  4. The halogen lamp intensity can be properly adjusted according to the magnification.
  5. The inspection mode is switchable on the PC screen.



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